Microfluidics Device Fabrication Service—Technics Plasma etcher 500-II

Microfluidic systems are capable of handling small amounts of liquid using microscopic tubes with dimensions of tens to hundreds of microns. Microfluidics is in rapid development as the next breakthrough technology and is used in a wide range of applications from biology and chemistry to information technology. CD BioSciences' microfluidic device manufacturing services include precision pressure controllers, flow sensors, pressure transducers, and more. We can provide microfluidic device manufacturing services based on Technics Plasma Etcher 500-II.

Name of the Instrument/Platform

Technics Plasma etcher 500-II

Protocol

1. Turn on the vacuum pump located next to the plasma cleaner.
2. Turn the main power on (red bottom).
3. Open the vacuum toggle switch (labeled as VAC in front panel), and check the
throttle pressure on the display (Wait until the pressure stabilizes between 0.100 Torr t-450
Torr. The pressure should not be oscillating abruptly). Write down this value.
4. Open gas 1 toggle switch (oxygen).
5. Adjust and stabilize the pressure at approximately 0.060Torr-0.080Torr difference from the
Vacuum pressure obtained previously. Wait approximately 2 mins.
6. Turn on the RF power switch and set the power at desired power depending on the process.
7. Turn off the RF power.
8. Turn off gas 1.
9. Turn off vacuum.
10. Switch to open vent toggle switch.
11. Wait until the door can be opened and TURN OFF THE VENT.

Summary

This plasma system is a RF plasma reactor equipped with stainless steel chamber 500 watt, 13.56 MHz RF generator, and on gas supplies, O₂. The equipment is able to process any size of samples that are smaller than 6in diameter. Some applications include: photoresist stripping, surface cleaning, and O₂ plasma surface treatment on Si or other substrates such as ceramic, metal, plastic, and glass.

CD BioSciences' solutions enable customers to get tailor-made microfluidic equipment for a wide range of steps in capillary electrophoresis, isotropic aggregation, immunoassays, flow cytometry, DNA analysis, etc. If you require this service, please do not hesitate to contact us.

For research use only, not intended for any clinical use.

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